YieldWatchDog
EQUIPMENT MONITORING MODULE
Equipment Monitoring Module allows the control of specific tools using electrical
wafer sort or scribe-line (PCM) data.
Equipment Monitoring Module can also be used for control of test and probing
equipment, allowing fast detection e.g. of probe card degradation.
Equipment Monitoring Module will detect any statistical significant difference in
the performance of similar tools thus making it the ideal control software for new
equipment ramp-up.
…observed with YieldWatchDog™
Equipment Monitoring Module.
Trend of test parameter with a
simulated equipment degradation
of tool LIT2…
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